QMC SLM Series is a fully automated mass production equipment that marks Good / NG marking, and Wafer ID Marking on top of wafers or substrates. By using suitable for each device and High-Speed Scanner, the equipment offers laser-precise and high productivity.
Item | SLM-200 | 비고 |
---|---|---|
Marking Side | Top side/Back side | |
Marking Accuracy | ± 50um | |
Beam Size | Up to 30um | |
System dimension | 2250 X 1250 X 1800 (mm) (W X D X H) |