QMC SLM Series is a fully automated mass production equipment that marks Good / NG marking, and Wafer ID Marking on top of wafers or substrates. By using suitable for each device and High-Speed Scanner, the equipment offers laser-precise and high productivity.
|Marking Side||Top side/Back side|
|Marking Accuracy||± 50um|
|Beam Size||Up to 30um|
|System dimension||2250 X 1250 X 1800 (mm) (W X D X H)|